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UHP Regulator

Ultra High Purity Regulators

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Ultra High Purity Regulator

Ultra High Purity Regulators by SuperlokUSA

SuperlokUSA® ultra high purity regulators are engineered for gas delivery systems where precision, reliability, and cleanliness are non-negotiable. These regulators are built to meet the strictest standards in semiconductor manufacturing, pharmaceuticals, biotechnology, and any ultra-clean environment where contamination-free performance is essential.
Each unit is constructed from 316 stainless steel—a corrosion-resistant alloy known for its durability and chemical resistance in harsh environments. Wetted components are electropolished and cleaned to stringent UHP standards, making these regulators ideal for clean in place instrumentation where maintaining system purity and flow integrity over time is critical.
Request a quote or call (805) 658-2043 to get matched with the right part for your high-purity pressure system.

Superlok’s ultra high purity regulators feature a compact design with minimal internal volume, allowing for faster system purging and reduced gas holdup. Low hysteresis and finely tuned pressure control ensure repeatable performance across a range of delivery pressures. The balanced valve design minimizes seat loading and extends seal life, helping maintain consistent regulation even during pressure fluctuations. These regulators are widely used in high-pressure systems, inert gas supply lines, and process gas delivery skids that demand tight control and long service life. Whether you’re managing high-purity oxygen, nitrogen, or corrosive gases in a sensitive system, Superlok ultra high purity regulators provide the exacting control needed to protect instrumentation and maintain uptime.

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Swagelok® uhp regulators by Superlok

Superlok® Ultra High Purity regulators are used across industries where precision fluid control isn’t optional it’s mission critical. From semiconductor fabs to pharmaceutical clean rooms, biotech labs to gas chromatography setups, system designers rely on Superlok for consistent regulation under extreme conditions. These are not generic regulators they’re engineered for pressure systems where drift, contamination, and downtime mean lost revenue.

Trusted by integrators and high-purity gas system manufacturers, Superlok’s UHP regulators are made from 316 stainless steel and feature ultra-smooth internal flow paths with low internal volume to minimize particle generation and maintain process integrity. These regulators support applications demanding precise fluid control, corrosion resistance, and leak-tight sealing.

Thanks to balanced poppet designs and tight downstream control ranges, Superlok UHP regulators deliver reliable performance even in the most sensitive pressure systems. They’re already in use by hygienic fluid processors, semiconductor manufacturing OEMs, and instrumentation engineers who build with one priority: control that never falters. Built to outperform in high-purity gas systems and backed by proven results, Superlok’s UHP line is a go-to for operations that require compliance without compromise.

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Swagelok® Alternate Parts Near

SuperlokUSA® offers Swagelok® alternate parts near you that match the same form, fit, and function as Swagelok® and Parker®. Machined to ASME B1.1 thread tolerances and made from 316 stainless steel, these fittings deliver reliable sealing, mechanical strength, and corrosion resistance.

SGS-certified for burst and interchangeability, SuperlokUSA® fittings are trusted by hygienic fluid processors, high-purity gas systems, and industries needing precise fluid control.

If you’re sourcing Swagelok®-style ultra high purity regulators near you, SuperlokUSA® delivers. Each UHP regulator is built with 316 stainless steel, cavity-free construction, and electro-polished finishes to reduce contamination and maintain downstream stability.

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Installation & Maintenance Best Practices

Ensuring precision, purity, and reliability in Superlok UHP regulator systems.

Superlok Ultra high purity regulators prioritize precise inlet alignment during setup to ensure seamless gas flow in high purity sanitary stainless steel systems. Deburr connections with chamfer tools to 45° edges, achieving 316 stainless steel surfaces with random roughness average (Ra) under 15 micro-inches for contamination-free operation. Position regulators at stable elevations using pipe stands level within 0.5° to avoid dead zones in fluid lines.

Connect via VCR fittings finger-tight then quarter-turn to 20 ft-lbs on 1/4-inch lines to 90 ft-lbs on 1/2-inch, using gap gauges to confirm gasket seating without tube distortion in pressure circuits.

For high purity fluid processors, install upstream of valves with manual bleed ports, incorporating clean-in-place (CIP) adapters for 300°F helium purges that reduce particulates below 0.1 micron without regulator disassembly.

Anchor with U-bolts every 8 inches to manage thermal cycling, followed by helium leak testing at 1.5 times maximum allowable working pressure (MAWP) for 15 minutes to verify no pathway breaches.

Flush with inert gas post-install for four volumes, tracking particle counts below 5 per cubic foot with inline monitors. In sanitary stainless steel applications, opt for diaphragm-seated models for CIP compatibility, verifying no contaminants via particle analysis under 50 per ml. Quarterly inspections employ helium mass spectrometers for leak rates below 0.01 scc/min, checking 316 stainless steel diaphragms for wear over 0.001 inches.
  • Service biannually in cleanrooms for diaphragm evaluation and orifice cleaning with lint-free swabs, followed by ultrasonic cleaning at 100°F and citric passivation to enhance oxide layers against chloride corrosion in corrosion-resistant alloys.
  • Re-calibrate setpoints post-350°F exposure, logging delivery pressures with digital gauges for accurate flow regulation optimization.
  • Document flush volumes and particle traces in maintenance logs, linking to system capacities for predictive startup sequencing in cleanroom protocols.
  • For hazardous zones, integrate intrinsically safe sensors, confirming purge rates exceed 4 volumes per minute to comply with NFPA 70 standards in gas panels.

These practices boost regulator longevity to 50,000 cycles, streamlining activations in semiconductor cleanrooms and pharmaceutical suites. Recorded metrics cut setup durations by 30%. Alignment and flushing emphasis guarantees reliable inerting across applications with our ultra high purity regulators.

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Quality & Standards Compliance

Superlok ultra high purity regulators are forged from 316 stainless steel per ASTM A312, delivering over 80 ksi yield and elongation exceeding 35% for resilience under pressure fluctuations. Lots undergo positive material identification (PMI) via optical emission spectroscopy, confirming nickel above 10% for pitting resistance equivalent numbers (PREN) surpassing 25 in aggressive chemistries.

  • Inlet threading adheres to ASME B1.20.1 tolerances of ±0.0005 inches on pitch diameter, gauged by thread micrometers and CMMs for flow coefficient (Cv) uniformity within 3% to enable consistent delivery rates.
  • Seat proofing at 1.5 times rated working pressure (RWP) per API 6D employs helium for integrity below 10^-7 scc/sec, enduring 40,000 cycles to mimic prolonged service without seat erosion.
  • Diaphragm travel calibration per ISO 4126 ensures full response within 0.004 inches, with CFD modeling delivery at 600 scfm for refined port geometry.
Electropolishing attains Ra 10 micro-inches, validated for 500-hour salt spray per ASTM B117 with no pitting on 316 stainless steel in corrosive environments. Assembly in ISO 14644 Class 5 cleanrooms limits particulates below 10 per cubic meter, suiting high purity fluid processors.
  • Interchangeability with Tescom®, Equilibar®, and Witt® confirmed by UL intermix trials, sustaining 2,000 psig without leakage or binding.
  • Proof margins exceed 4 times RWP, documented in mill test reports (MTRs) with dye penetrant NDT for surface defects under 0.0004 inches, per ASME Section IX.
  • Helium compatibility per ASTM G4 reveals no permeation at 3,000 psi, while shock testing per ISO 6802 affirms no setpoint drift after 1,500 hours.
  • UL third-party audits encompass pressure profiling and radiographic NDT for wall consistency below 0.0008 inches, granting certificates of compliance (CoCs) under ISO 9001:2015.

This regimen yields regulators for 20-year deployment in gas cabinets and lab hoods, exceeding benchmarks for flow control in pressure systems. Traceability aids CE and SEMI certifications from manifolds to outlets. Precision engineering propels efficient regulation. 

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Frequently Asked Questions

What materials are Superlok ultra high purity regulators constructed from?
Superlok UHP regulators utilize 316 stainless steel construction for superior corrosion resistance, aligning with ASTM A312 specs and low carbon under 0.03% to avoid intergranular attack in ultra-high purity gases. Titanium variants fit aggressive acid lines like hydrofluoric for etch processes, while Hastelloy C-276 options tackle severe oxidizing service in semiconductor wafer processing, enduring over 10,000 cycles without pitting.
Superlok inlet bodies rate to 6,000 psig at ambient for 1/4-inch sizes, derating to 3,000 psig at 400°F per ASME B31.3 factors for sustained delivery stability in thermal environments. Outlet ports hold 4,500 psig cold non-shock, with domes at 5,500 psig, providing precise control down to 0.1 psig increments without setpoint drift or hysteresis in dynamic gas flows.
Superlok regulators match dimensionally with Tescom®, Equilibar®, and Witt® standards, including VCR per ASME B16.33 and diaphragm profiles with equivalent tension for plug-and-play upgrades in existing setups. This permits seamless integration in high purity tubing assemblies without pressure drops or recalibration, maintaining Cv consistency above 0.1 and zero dead volume for contamination-free cleanroom gas panels.
Determine nominal tube size (NTS) by outer diameter and wall schedule, then reference Superlok guides for corresponding inlet/outlet ports to optimize Cv values above 0.06 in low-flow scenarios. For high purity fluid processors, choose low-flow designs to maintain laminar flow under Reynolds number 1,800, minimizing dead volumes below 0.05 cc in specialty gas delivery for precise precursor metering.
Stock units dispatch same-day from regional warehouses, enabling rapid response for emergency fab shutdowns with standard spring ranges and port configurations. Custom spring ranges or exotic alloys demand 3-5 weeks production, with rush fabrication reducing to 5-8 days via dedicated prototyping lines to support urgent tool qualifications and minimize production halts.
Yes, electropolished models provide Ra 8 micro-inch internals, certified ultra-clean per ISO 14644 Class 4 for semiconductor gases like arsine and phosphine in deposition tools. They withstand 150+ CIP cycles absent material degradation, supporting particle counts below 0.01 per cubic foot and extractables under 5 ppb TOC in high-vacuum chambers.
Store in controlled environments at 50-85°F with humidity under 40%, isolated from ferrous metals to prevent flash rust on seats and diaphragms during idle periods. Use vacuum-sealed pouches with desiccants for extended shelf life up to 3 years, checking for particulates below 0.1 micron and gasket integrity before installation in sensitive manifolds to avoid contamination risks.
For 1/4-inch VCR, apply 25 ft-lbs initial followed by leak-check after evacuation to ensure helium-tight seals at 1×10^-9 scc/sec in vacuum-rated connections. Larger 1/2-inch fittings require 100 ft-lbs max using anti-galling compounds, preventing diaphragm stress and achieving uniform compression in high-vacuum setups without over-torquing.
Superlok bodies function to -300°F with impact toughness over 40 ft-lbs, ideal for argon and nitrogen lines in cryogenic pumping stations and liquefaction plants. Cryogenic testing per ASTM E23 verifies ductility retention above 80% at service temperatures, with derates below -150°F ensuring no brittle failure during rapid cooldown cycles or thermal shocks.

Industry Leaders Using Superlok

Superlok ultra high purity regulators are trusted by leading industries where fluid purity, pressure stability, and zero contamination are absolutely critical. These regulators are relied upon by professionals in semiconductor fabrication, pharmaceutical manufacturing, biotechnology labs, and high-spec specialty gas systems anywhere precise pressure control and ultra-clean performance are required.

Each regulator is manufactured from corrosion-resistant 316 stainless steel and features electropolished, D.I. water-cleaned internals. They’re assembled and sealed in certified cleanroom environments to prevent particulate introduction at the source. Built to meet the highest purity standards, Superlok UHP regulators deliver smooth downstream control with tight tolerances and excellent long-term repeatability. This makes them ideal for gas delivery panels, orbital weld systems, analyzer manifolds, and any high-purity setup where pressure stability must hold even during system cycling or thermal fluctuation.

These regulators are tested and validated for critical use in industries that depend on hygienic fluid processing, precise fluid control, and contamination-free operation. From OEM tool installations to field-service gas supply upgrades, Superlok delivers reliable, leak-free pressure regulation backed by SGS-certified performance and availability through U.S. inventory. When system purity, compatibility, and uptime matter most, Superlok ultra high purity regulators are the trusted choice.

Superlok Advantage

LARGEST INVENTORY OF ULTRA HIGH PURITY REGULATORS READY TO SHIP

SuperlokUSA maintains one of the most robust inventories of ultra high purity regulators in the United States. Each regulator is precision-engineered with 316 stainless steel for superior corrosion resistance, long service life, and compatibility with the most sensitive gas delivery environments. These aren’t off-the-shelf generic parts they’re cleanroom-assembled, electropolished, and D.I. water cleaned, meeting the strict cleanliness and particulate control standards required in semiconductor manufacturing, pharmaceuticals, and other ultra-clean applications.
By keeping high volumes of popular models in stock, SuperlokUSA eliminates the long lead times that plague competitors. Whether you’re managing a critical install, replacing a failed regulator in a live system, or scaling up for new capacity, Superlok's ready-to-ship inventory ensures you don’t have to compromise on quality or timing. Customers trust us for responsive fulfillment of components that meet clean in place instrumentation standards and the demands of precise fluid control in high-purity gas pressure systems. With full material traceability and real-time inventory management, SuperlokUSA supports engineers and procurement teams who can’t afford to wait. We stock what others backorder.

FAST DELIVERY ANYWHERE IN THE U.S.WITHOUT COMPROMISING PURITY

When you need a corrosion-resistant ultra high purity regulator fast, SuperlokUSA is built to deliver literally. Our logistics system is optimized for speed, accuracy, and reliability, with fulfillment centers equipped to handle sensitive components with cleanroom-grade packaging and care. We ship nationwide with fast lead times and transparent tracking, so your facility stays on schedule.
Through strategic carrier relationships, we’re able to offer expedited delivery of factory-clean regulators tested, validated, and ready for install. Every unit is helium leak-tested and pressure validated before leaving our facility, giving customers confidence that what arrives is not only fast, but flawless. Unlike overseas supply chains that delay your project or send inconsistent components, SuperlokUSA’s domestic advantage gives your cleanroom pipeline access to proven performance without the wait. For facilities that depend on absolute pressure control and contaminant-free flow there’s no time for delays.

Request A Quote
Call Us (805) 658-2043
Request A Quote
Call Us (805) 658-2043